Committee

ALD Program Chairs:

Program Chair:
Jane Chang (University of California, Los Angeles, USA)

Program Co-Chair:
Steve George (University of Colorado at Boulder, USA)

Program Co-Chair:
Thorsten Lill (Lam Research, USA)

ALD Program Committee:

• Noureddine Adjeroud (LIST, Luxembourg)
• Sumit Agarwal (Colorado School of Mines, USA)
• Sakurai Atsushi (ADEKA Corporation, Japan)
• Parag Banerjee (University of Central Florida, USA)
• Sean Barry (Carleton University, Canada)
• Stacey Bent (Stanford University, USA)
• Haripin Chandra (Versum/EMD, USA)
• Rong Chen (Huazhong University of Science and Technology, China)
• Robert Clark (TEL, USA)
• Scott Clendenning (Intel, USA)
• John F. Conley, Jr. (Oregon State University, USA)
• Arrelaine Dameron (Forge Nano, USA)
• Neil Dasgupta (University of Michigan, USA)
• Jolien Dendooven (Ghent University, Belgium)
• Christophe Detavernier (Ghent University, Belgium)
• Charles Dezelah (ASM Microchemistry, USA)
• Shi-Jin Ding (Fudan University, China)
• Christian Dussarrat (Air Liquide, France)
• Simon Elliott (Schrödinger, Ireland)
• Benjamin Greenberg (Naval Research Lab, USA)
• Dennis Hausmann (Lam Research, USA)
• HanJin Lim (Samsung Electronics, South Korea)
• Jiyoung Kim (University of Texas at Dallas, USA)
• Woo-Hee Kim (Hanyang University, South Korea)
• Mato Knez (Nanogune, Spain)
• Harm Knoops (Oxford Instruments, UK)
• Han-Bo-Ram Lee (Incheon National University, South Korea)
• Sang Young Lee (Intel Corporation, USA)
• Wei-Min Li (Lead Micro, China)
• Adrie Mackus (Eindhoven University of Technology, The Netherlands)
• Michael McSwiney (Applied Materials, USA)
• Chang-Yong Nam (Brookhaven National Lab, USA)
• Michael Nolan (Tyndall University, Ireland)
• Jin-Seong Park (Hanyang University, South Korea)
• Beun Park (Samsung Advanced Institute of Technology, South Korea)
• Henrik Pedersen (Linköping University, Sweden)
• Michelle Paquette (University of Missouri Kansas City, USA)
• Tero Pilvi (Picosun, Finland)
• Paul Poodt (SparkNano, The Netherlands)
• Matti Putkonen (University of Helsinki, Finland)
• Riikka Puurunen (Aalto University, Finland)
• Joel Molina Reyes (Instituto Nacional de Astrofísica, Óptica y Electrónica, Mexico)
• Mikko Ritala (University of Helsinki, Finland)
• Seung Wook Ryu (SK Hynix, South Korea)
• Tania Sandoval (Universidad Técnica Federico Santa María, Chile)
• Shaibal Sarkar (IIT Bombay, India)
• Nathanaelle Schneider (CNRS, France)
• Uwe Schroeder (Namlab, Germany)
• Nicholas Strandwitz (Lehigh University, USA)
• Ganesh Sundaram (Veeco, USA)
• Adriana Szeghalmi (Fraunhofer Institute of Applied Optics, Germany)
• Christophe Vallee (SUNY POLY, France)
• Ruud Van Ommen (Delft University of Science & Technology, The Netherlands)
• Charles Winter (Wayne State University, USA)
• Jinjuan Xiang (Beijing Superstring Academy of Memory Technology, China)
• Seung-Yeol Yang (Samsung, South Korea)
• Angel Yanguas-Gil (Argonne National Lab, USA)

ALD 2022 Social Media Chairs

• Michael Nolan (Tyndall, Ireland)
• Henrik Pedersen (Linköping University, Sweden)

ALD International Advisory Committee:

• Annelies Delabie (imec, Belgium)
• Anjana Devi (Ruhr-University Bochum, Germany)
• Jeffrey Elam (Argonne National Lab, USA)
• Steven George (University of Colorado at Boulder, USA)
• Cheol Seong Hwang (Seoul National University, South Korea)
• Hyeongtag Jeon (Hanyang University, South Korea)
• Erwin Kessels (Eindhoven University of Technology, The Netherlands)
• Hyungjun Kim (Yonsei University, South Korea)
• Sang In Lee (Synos Foundation, USA)
• Markku Leskelä (University of Helsinki, Finland)
• Gregory N. Parsons (North Carolina State University, USA)
• Viljami Pore (ASM, Finland)

ALD Steering Committee:

• Steven George (University of Colorado at Boulder, USA)
• Erwin Kessels (University of Eindhoven, The Netherlands)
• Hyungjun Kim (Yonsei University, South Korea)
• Gregory N. Parsons (North Carolina State University, USA

ALE Program Committee:

• Sumit Agarwal (Colorado School of Mines, USA)
• Stacey Bent (Stanford Univ., USA)
• David Boris (NRL, USA)
• Jane Chang (University of California, Los Angeles)
• Jean-Francois de Marneffe (Imec, Belgium)
• Remi Dussart (GREMI, Polytech Orleans, France)
• Jeff Elam (Argonne National Laboratory, USA)
• Steve George (University of Colorado at Boulder, USA)
• Satoshi Hamaguchi (Osaka University, Japan)
• Craig Huffman (Micron, USA)
• Yohei Ishii (Hitachi High Technologies USA)
• Eric Joseph (IBM, USA)
• Keren Kanarik (Lam Research, USA)
• Erwin Kessels (Eindhoven University of Technology, The Netherlands)
• Harm Knoops (Oxford Instruments, The Netherlands)
• Thorsten Lill (Lam Research, USA)
• Anil Mane (Argonne National Lab, USA)
• Gottlieb Oehrlein (University of Maryland, USA)
• Venkat Pallem (Air Liquide, USA)
• Nicolas Possémé (Leti, France)
• Angelique Raley (TEL, USA)
• Tatayana Rakhimova (Lomonosov Moscow State University Skobeltsyn Institute, Russia)
• Fred Roozeboom (TNO, The Netherlands)
• Dmitry Suyatin (Lund University, Sweden)
• Tetsuya Tatsumi (Sony Corp., Japan)
• Geun Young Yeom (Sungkyunkwan University, South Korea)

ALE Steering Committee:

• Craig Huffman (Micron, USA)
• Eric Joseph (IBM, USA)
• Keren Kanarik (Lam Research, USA)
• Steve George (University of Colorado at Boulder, USA)